TABLE V

Screening Analysis of BDS for Anions, Cations, Formaldehyde, and Silicon

CompoundsAnalytical Methods
Concentration (ppm)
Concentration (ppm)
Detection LimitWFI RinsateDetection LimitFiltered BDS
AnionsIC
    Fluoride0.002<0.0022<2
    Chloride0.0020.04925900
    Nitrite0.002<0.0022<2
    Bromide0.002<0.0022<2
    Nitrate0.002<0.0022<2
    Sulfate0.0020.0352<2
    Phosphate0.002<0.0022<2
    Acetate0.0005<0.00050.0005<0.0005
    Formate0.0005<0.00050.0005<0.0005
CationsIC
    Lithium0.002<0.0022<2
    Sodium0.0020.1623400
    Ammonium0.0020.0082<2
    Potassium0.0020.0072<2
    Magnesium0.002<0.0022<2
    Calcium0.0020.0072<2
    Glysidyltrimethyl Ammonium1<11<1
LC-DAD
    Formaldehyde0.1<0.10.1<0.1
ICP-AES
    Silicon0.1<0.10.10.15