Laser-Drilled Holes—Specifications
| Hole Diameter (μm) | Position: A = above fill level B = below fill level | Serial Number ID Range | Flow Rate (sccm) | Number of Units |
|---|---|---|---|---|
| 5 | B | 1–10 | 0.213 | 10 |
| 5 | A | 11–20 | 10 | |
| 10 | B | 21–30 | 0.855 | 10 |
| 10 | A | 31–40 | 10 | |
| 20 | B | 41–50 | 3.41 | 10 |
| 20 | A | 51–60 | 10 |