Measured MgF2-Coated Standards Compared to the Certified Layer Thicknesses (n = 20)
| Certified Layer Thickness (nm) | Average Layer Thickness (ALT) (nm) | Accuracy (%) | Correlation Coefficient R2 (−) |
|---|---|---|---|
| 115 ± 1 | 107 ± 1 | 93 | 1.000 |
| 146 ± 2 | 139 ± 1 | 95 | |
| 451 ± 3 | 449 ± 1 | 99 | |
| 473 ± 9 | 469 ± 0 | 99 |