Measured Chrome-Coated Step Height Standards Compared to the Certified Layer Thicknesses (n = 3) for 3D-LSM Measurements and Measured MgF2 Standards Compared to the Certified Layer Thicknesses (n = 2) for WLI+LAI Measurements
| Method | Certified Layer Thickness (nm) | Average Layer Thickness (ALT) (nm) | Accuracy (%) |
|---|---|---|---|
| 3D-LSM | 17.3 ± 1.2 | 16.7 ± 1.2 | 96.3 |
| 3D-LSM | 89.4 ± 1.6 | 86.7 ± 3.3 | 96.9 |
| WLI+LAI | 44 ± 3 | 41 ± 1 | 93 |
| WLI+LAI | 88 ± 4 | 79 ± 0 | 90 |
| WLI+LAI | 167 ± 4 | 164 ± 0 | 98 |
| WLI+LAI | 540 ± 13 | 531 ± 0 | 98 |